This Dataverse brings together the data produced during the ANR MIFs project concerning experiments carried out at the Laboratoire des Sciences des Procédés et des Matériaux (Sorbonne Paris Nord University). The Datasets in this Dataverse describe the conditions and parameters of the various experiments conducted within the framework of the ANR project. They also present the main data produced by the different analyses performed during the experiments (mass spectrometry) and on the experimental deposits (optical microscope images, scanning electron microscope images, chemical analyses of the deposits carried out by SEM, and isotopic analyses performed using an ion probe, IMS-1270 at CRPG-Nancy or NanoSIMS at MNHN-Paris).
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Adobe PDF - 42.9 MB - MD5: 279f759fd4e68daeff07f5cca23371ce
This file summarizes the protocols of the experiments carried out during the ANR MIF project. This file also shows the various analyses performed during the experiments and on the deposits produced.
Tabular Data - 37.3 KB - 24 Variables, 196 Observations - UNF:6:NRvMV6ixJTYU0hDnh9Vurw==
This file summarizes the protocols of the experiments conducted during the ANR MIF project, and provides the parameter values for each experiment (gas composition, pressure, duration, plasma characteristic, polarization intensity and voltage, target type, etc.).
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